产品介绍 技术参数: Candela CS1 SPECIFICATIONS Substrate Sizes: 2 in. – 200 mm diameter* *Other sizes may be available on request Thickness: 350 μm – 1,100 μm Material: Any opaque, polished surface which scatters ≥ 10% of incident light Any clear, polished substrate which scatters ≥ 10% of incident light Defect Sensitivity 0.3 μm diameter PSL sphere equivalent ≥ 95% capture rate (PSL on bare Si) Other Defects and Applications Defect Types: Particles, scratches, stains, pits, and bumps. Classification accuracy and minimum detectable sizes depend on optical signatures of defects. Sensitivity: Minimum detectable size for automatic defect classification: - Scratches: 100 μm long, 0.1 μm wide, 50 Å deep - Pits: 20 μm diameter, 50 Å deep - Stains: 20 μm diameter, 10 Å thick Note: Defect signal must be more than 3x background P-V signal |
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